Sputtering materials for VLSI and thin film devices / Jaydeep Sarkar
| Main Author: | Sarkar, Jaydeep |
|---|---|
| Format: | MONOGRAPHS |
| Language: | English |
| Published: |
Amsterdam : Elsevier, 2014 |
| Subjects: |
Cathode sputtering (Plating process) --
> Materials.
Flat panel displays -- > Materials. Integrated circuits -- > Very large scale integration -- > Materials. Microelectronics -- > Materials. Thin film devices -- > Materials. Sputtering (Physics) |
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| 040 | |a DLC |c MUT | ||
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| 100 | 1 | |a Sarkar, Jaydeep | |
| 245 | 1 | 0 | |a Sputtering materials for VLSI and thin film devices |b / |c Jaydeep Sarkar |
| 260 | |a Amsterdam : |b Elsevier, |c 2014 | ||
| 300 | |a x, 603 p. : |b illus. ; |c 24 cm. | ||
| 504 | |a Includes bibliographical references and index. | ||
| 650 | 0 | |a Cathode sputtering (Plating process) -- |x Materials. | |
| 650 | 0 | |a Flat panel displays -- |x Materials. | |
| 650 | 0 | |a Integrated circuits -- |x Very large scale integration -- |x Materials. | |
| 650 | 0 | |a Microelectronics -- |x Materials. | |
| 650 | 0 | |a Thin film devices -- |x Materials. | |
| 650 | 0 | |a Sputtering (Physics) | |
| 991 | |a MONOGRAPHS |b 6 |c 2018-11-06 20:12:34 |d 2022-08-13 14:01:23 |e mut |f n |g null |h n |i a |j m |k |l a |m |n a |o |p b |q |r ne |s eng |t 2014 |v Sputtering materials for VLSI and thin film devices / | ||