Sputtering materials for VLSI and thin film devices - Sarkar, Jaydeep (Amsterdam : Elsevier, 2014)
Includes bibliographical references and index.
Keywords: Cathode sputtering (Plating process) -- -- Materials; Flat panel displays -- -- Materials; Integrated circuits -- -- Very large scale integration -- -- Materials; Microelectronics -- -- Materials; Thin film devices -- -- Materials; Sputtering (Physics)