Sputtering materials for VLSI and thin film devices / Jaydeep Sarkar
| Main Author: | Sarkar, Jaydeep |
|---|---|
| Format: | MONOGRAPHS |
| Language: | English |
| Published: |
Amsterdam : Elsevier, 2014 |
| Subjects: |
Cathode sputtering (Plating process) --
> Materials.
Flat panel displays -- > Materials. Integrated circuits -- > Very large scale integration -- > Materials. Microelectronics -- > Materials. Thin film devices -- > Materials. Sputtering (Physics) |
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| Physical Description: |
x, 603 p. : illus. ; 24 cm. |
|---|---|
| Bibliography: |
Includes bibliographical references and index. |
| ISBN: |
9780815515937 |