Plasma sources for thin film deposition and etching / edited by Maurice H. Francombe, John L. Vossen
| Other Authors: | Francombe, Maurice H., Vossen, John L. |
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| Format: | MONOGRAPHS |
| Language: | English |
| Published: |
San Diego, CA. : Academic Press, 2008 |
| Series: |
Physics of thin films
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| Subjects: |
Thin films.
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| Tags: |
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| Physical Description: |
xii, 328 p. : illus. ; 23 cm. |
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| Bibliography: |
Includes bibliographical references and index. |
| ISBN: |
0125330189 |