Record Citations

APA Citation

Francombe, M. H., & Vossen, J. L. (2008). Plasma sources for thin film deposition and etching. San Diego, CA.: Academic Press.

MLA Citation

Francombe, Maurice H., and John L Vossen. Plasma Sources for Thin Film Deposition and Etching. San Diego, CA.: Academic Press, 2008.

Warning: These citations may not always be 100% accurate.