Microlithography : science and technology / edited by Kazuaki Suzuki, Bruce W. Smith
| Other Authors: | Smith, Bruce W., Suzuki, Kazuaki |
|---|---|
| Format: | MONOGRAPHS |
| Language: | English |
| Published: |
Boca Raton : CRC Press, 2007 |
| Edition: | 2nd ed. |
| Series: |
Optical science and engineering
126
|
| Subjects: |
Integrated circuits --
> Masks.
Metal oxide semiconductors, Complementary -- > Design and construction. Microlithography -- > Industrial applications. Manufacturing processes. |
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| 040 | |a DLC |c MUT | ||
| 050 | 4 | |a TK7836 |b M527 2007 | |
| 245 | 1 | 0 | |a Microlithography : science and technology |b / |c edited by Kazuaki Suzuki, Bruce W. Smith |
| 250 | |a 2nd ed. | ||
| 260 | |a Boca Raton : |b CRC Press, |c 2007 | ||
| 300 | |a 848 p. : |b illus. ; |c 26 cm. | ||
| 440 | 0 | |a Optical science and engineering |v 126 | |
| 504 | |a Includes bibliographical references and index. | ||
| 650 | 0 | |a Integrated circuits -- |x Masks. | |
| 650 | 0 | |a Metal oxide semiconductors, Complementary -- |x Design and construction. | |
| 650 | 0 | |a Microlithography -- |x Industrial applications. | |
| 650 | 0 | |a Manufacturing processes. | |
| 700 | 1 | |a Smith, Bruce W. | |
| 700 | 1 | |a Suzuki, Kazuaki | |
| 991 | |a MONOGRAPHS |b 6 |c 2018-11-06 19:34:56 |d 2022-05-11 08:51:49 |e mut |f n |g null |h n |i a |j m |k |l a |m |n a |o |p b |q |r flu |s eng |t 2007 |u 2nd ed. |v Microlithography : science and technology / | ||