Microlithography : science and technology / edited by Kazuaki Suzuki, Bruce W. Smith
| Other Authors: | Smith, Bruce W., Suzuki, Kazuaki |
|---|---|
| Format: | MONOGRAPHS |
| Language: | English |
| Published: |
Boca Raton : CRC Press, 2007 |
| Edition: | 2nd ed. |
| Series: |
Optical science and engineering
126
|
| Subjects: |
Integrated circuits --
> Masks.
Metal oxide semiconductors, Complementary -- > Design and construction. Microlithography -- > Industrial applications. Manufacturing processes. |
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| Physical Description: |
848 p. : illus. ; 26 cm. |
|---|---|
| Bibliography: |
Includes bibliographical references and index. |
| ISBN: |
0824790243 |