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Record Citations
APA Citation
Smith, B. W., & Suzuki, K. (2007). Microlithography : science and technology (2nd ed.). Boca Raton: CRC Press.
MLA CitationSmith, Bruce W., and Kazuaki Suzuki. Microlithography : Science and Technology. 2nd ed. Boca Raton: CRC Press, 2007.
Warning: These citations may not always be 100% accurate.