Chemical vapor deposition : thermal and plasma deposition of electronic materials / S. Sivaram
| Main Author: | Sivaram, S. |
|---|---|
| Format: | MONOGRAPHS |
| Language: | English |
| Published: |
New York : Van Nostrand Reinhold, 1995 |
| Subjects: |
Chemical vapor deposition.
Microelectronics -- > Materials. Microelectronics industry. Systems engineering. Computer engineering. Engineering. |
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| Physical Description: |
xii, 292 p. : illus. ; 23 cm. |
|---|---|
| Bibliography: |
Includes bibliographical references and index. |
| ISBN: |
0442010796 |