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Record Citations
APA Citation
Sivaram, S. (1995). Chemical vapor deposition : thermal and plasma deposition of electronic materials. New York: Van Nostrand Reinhold.
MLA CitationSivaram, S. Chemical Vapor Deposition : Thermal and Plasma Deposition of Electronic Materials. New York: Van Nostrand Reinhold, 1995.
Warning: These citations may not always be 100% accurate.