VLSI metallization : physics and technologies / edited by Krishna Shenai
| Format: | MONOGRAPHS |
|---|---|
| Language: | English |
| Published: |
London : Artech House, 1991 |
| Subjects: |
Electric contacts.
Metallizing. Semiconductor-metal boundaries. Integrated circuits -- > Very large scale integration. |
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| Item Description: |
Includes index. |
|---|---|
| Physical Description: |
v. : 24 cm. |
| ISBN: |
0890065012 |