VLSI metallization : physics and technologies / edited by Krishna Shenai
| Format: | MONOGRAPHS |
|---|---|
| Language: | English |
| Published: |
London : Artech House, 1991 |
| Subjects: |
Electric contacts.
Metallizing. Semiconductor-metal boundaries. Integrated circuits -- > Very large scale integration. |
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| Call Number: | TK7872.C68 V484 |
|---|---|
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