VLSI metallization : physics and technologies / edited by Krishna Shenai
| Format: | MONOGRAPHS |
|---|---|
| Language: | English |
| Published: |
London : Artech House, 1991 |
| Subjects: |
Electric contacts.
Metallizing. Semiconductor-metal boundaries. Integrated circuits -- > Very large scale integration. |
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| 040 | |a DLC |c MUT | ||
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| 245 | 1 | 0 | |a VLSI metallization : physics and technologies |b / |c edited by Krishna Shenai |
| 260 | |a London : |b Artech House, |c 1991 | ||
| 300 | |a v. : |c 24 cm. | ||
| 500 | |a Includes index. | ||
| 650 | 0 | |a Electric contacts. | |
| 650 | 0 | |a Metallizing. | |
| 650 | 0 | |a Semiconductor-metal boundaries. | |
| 650 | 0 | |a Integrated circuits -- |x Very large scale integration. | |
| 991 | |a MONOGRAPHS |b 6 |c 2018-11-06 18:05:58 |d 2022-08-04 13:12:57 |e mut |f n |g null |h n |i a |j m |k |l a |m |n a |o |p b |q |r enk |s eng |t 1991 |v VLSI metallization : physics and technologies / | ||