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Handbook of thin film deposition : processes and technologies / edited by Krishna Seshan

Other Authors: Seshan, Krishna
Format: MONOGRAPHS
Language: English
Published: Norwich, NY. : Noyes Pub., 2002
Edition: 2nd ed.
Subjects: Electronic resource.
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020 |a 0815514425  |c 5610 
040 |a DLC  |c MUT 
050 4 |a TK7872.T55  |b H353 
245 1 0 |a Handbook of thin film deposition : processes and technologies  |b /  |c edited by Krishna Seshan 
250 |a 2nd ed. 
260 |a Norwich, NY. :  |b Noyes Pub.,  |c 2002 
300 |a xxviii, 629 p. :  |b illus. ;  |c 23 cm. 
504 |a Includes bibliographical references and index. 
650 0 |a Electronic resource. 
700 1 |a Seshan, Krishna 
991 |a MONOGRAPHS  |b 4  |c 2018-11-07 01:29:00  |d 2022-08-18 15:22:32  |e mut  |f n  |g null  |h n  |i a  |j m  |k    |l a  |m    |n a  |o    |p b  |q    |r nyu  |s eng  |t 2002   |u 2nd ed.  |v Handbook of thin film deposition : processes and technologies / 

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