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|a 0815514425
|c 5610
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|a DLC
|c MUT
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4 |
|a TK7872.T55
|b H353
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| 245 |
1 |
0 |
|a Handbook of thin film deposition : processes and technologies
|b /
|c edited by Krishna Seshan
|
| 250 |
|
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|a 2nd ed.
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| 260 |
|
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|a Norwich, NY. :
|b Noyes Pub.,
|c 2002
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| 300 |
|
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|a xxviii, 629 p. :
|b illus. ;
|c 23 cm.
|
| 504 |
|
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|a Includes bibliographical references and index.
|
| 650 |
|
0 |
|a Electronic resource.
|
| 700 |
1 |
|
|a Seshan, Krishna
|
| 991 |
|
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|a MONOGRAPHS
|b 4
|c 2018-11-07 01:29:00
|d 2022-08-18 15:22:32
|e mut
|f n
|g null
|h n
|i a
|j m
|k
|l a
|m
|n a
|o
|p b
|q
|r nyu
|s eng
|t 2002
|u 2nd ed.
|v Handbook of thin film deposition : processes and technologies /
|