Handbook of thin film deposition : processes and technologies / edited by Krishna Seshan
| Other Authors: | Seshan, Krishna |
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| Format: | MONOGRAPHS |
| Language: | English |
| Published: |
Norwich, NY. : Noyes Pub., 2002 |
| Edition: | 2nd ed. |
| Subjects: |
Electronic resource.
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| Physical Description: |
xxviii, 629 p. : illus. ; 23 cm. |
|---|---|
| Bibliography: |
Includes bibliographical references and index. |
| ISBN: |
0815514425 |