Plasma-aided nanofabrication : from plasma sources to nanoassembly / Kostya (Ken) Ostrikov, Shuyan Xu
| Main Author: | Ostrikov, Kostya (Ken) |
|---|---|
| Other Authors: | Xu, Shuyan |
| Format: | MONOGRAPHS |
| Language: | English |
| Published: |
Weinheim : Wiley-VCH, 2007 |
| Subjects: |
Low temperature plasmas.
Nanostructured materials. Plasma engineering. |
| Tags: |
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| 020 | |a 9783527406333 |c 3462 | ||
| 040 | |a DLC |c MUT | ||
| 050 | 4 | |a TA418.9.N35 |b O88P44 | |
| 100 | 1 | |a Ostrikov, Kostya (Ken) | |
| 245 | 1 | 0 | |a Plasma-aided nanofabrication : from plasma sources to nanoassembly |b / |c Kostya (Ken) Ostrikov, Shuyan Xu |
| 260 | |a Weinheim : |b Wiley-VCH, |c 2007 | ||
| 300 | |a xiii, 300 p. : |b illus. ; |c 24 cm. | ||
| 504 | |a Includes bibliographical references and index. | ||
| 650 | 0 | |a Low temperature plasmas. | |
| 650 | 0 | |a Nanostructured materials. | |
| 650 | 0 | |a Plasma engineering. | |
| 700 | 1 | |a Xu, Shuyan | |
| 991 | |a MONOGRAPHS |b 4 |c 2018-11-07 06:18:55 |d 2021-11-24 08:00:12 |e mut |f n |g null |h n |i a |j m |k |l a |m |n a |o |p b |q |r gw |s eng |t 2007 |v Plasma-aided nanofabrication : from plasma sources to nanoassembly / | ||