Plasma-aided nanofabrication : from plasma sources to nanoassembly / Kostya (Ken) Ostrikov, Shuyan Xu
| Main Author: | Ostrikov, Kostya (Ken) |
|---|---|
| Other Authors: | Xu, Shuyan |
| Format: | MONOGRAPHS |
| Language: | English |
| Published: |
Weinheim : Wiley-VCH, 2007 |
| Subjects: |
Low temperature plasmas.
Nanostructured materials. Plasma engineering. |
| Tags: |
Add
No Tags, Be the first to tag this record!
|
| Physical Description: |
xiii, 300 p. : illus. ; 24 cm. |
|---|---|
| Bibliography: |
Includes bibliographical references and index. |
| ISBN: |
9783527406333 |