Principles of plasma discharges and materials processing / Michael A. Lieberman, Allan J. Lichtenberg
| Main Author: | Lieberman, Michael A. |
|---|---|
| Other Authors: | Lichtenberg, Allan J. |
| Format: | MONOGRAPHS |
| Language: | English |
| Published: |
Hoboken, NJ. : John Wiley & Sons, 2005 |
| Edition: | 2nd ed. |
| Subjects: |
Plasma chemistry --
> Industrial applications.
Plasma dynamics. Plasma etching. Thin films -- > Surfaces. |
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| Physical Description: |
xxxv, 757 p. : illus. ; 24 cm. |
|---|---|
| Bibliography: |
Includes bibliographical references and index. |
| ISBN: |
0471720010 |