Nanofabrication : fundamentals and applications / edited by Ampere A. Tseng
| Other Authors: | Tseng, Ampere A. |
|---|---|
| Format: | MONOGRAPHS |
| Language: | English |
| Published: |
Hackensack, NJ. World Scientific, 2008 |
| Subjects: |
Lithography, Electron beam.
Nanostructured materials. Nanostructures. Scanning probe microscopy. |
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| 040 | |a DLC |c MUT | ||
| 050 | 4 | |a TA418.9.N35 |b N358 | |
| 245 | 1 | 0 | |a Nanofabrication : fundamentals and applications |b / |c edited by Ampere A. Tseng |
| 260 | |a Hackensack, NJ. |b World Scientific, |c 2008 | ||
| 300 | |a viii, 574 p. : |b illus. ; |c 25 cm. | ||
| 504 | |a Includes bibliographical references and index. | ||
| 650 | 0 | |a Lithography, Electron beam. | |
| 650 | 0 | |a Nanostructured materials. | |
| 650 | 0 | |a Nanostructures. | |
| 650 | 0 | |a Scanning probe microscopy. | |
| 700 | 1 | |a Tseng, Ampere A. | |
| 991 | |a MONOGRAPHS |b 8 |c 2018-11-07 06:31:20 |d 2022-08-03 14:47:06 |e mut |f n |g null |h n |i a |j m |k |l a |m |n a |o |p b |q |r nju |s eng |t 2008 |v Nanofabrication : fundamentals and applications / | ||