Nanofabrication : fundamentals and applications / edited by Ampere A. Tseng
| Other Authors: | Tseng, Ampere A. |
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| Format: | MONOGRAPHS |
| Language: | English |
| Published: |
Hackensack, NJ. World Scientific, 2008 |
| Subjects: |
Lithography, Electron beam.
Nanostructured materials. Nanostructures. Scanning probe microscopy. |
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| Physical Description: |
viii, 574 p. : illus. ; 25 cm. |
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| Bibliography: |
Includes bibliographical references and index. |
| ISBN: |
9789812705426 |