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Clean room design : minimizing contamination through proper design / Bengt Ljungqvist, Berit Reinmuller

Main Author: Ljungqvist, Bengt
Other Authors: Reinmuller, Berit
Format: MONOGRAPHS
Language: English
Published: Boca Raton : CRC Press, 2002
Subjects: Clean rooms.
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020 |a 1574910329  |c 4142 
040 |a DLC  |c MUT 
050 4 |a TH7694  |b L49C44 
100 1 |a Ljungqvist, Bengt 
245 1 0 |a Clean room design : minimizing contamination through proper design  |b /  |c Bengt Ljungqvist, Berit Reinmuller 
260 |a Boca Raton :  |b CRC Press,  |c 2002 
300 |a x, 145 p. :  |b illus. ;  |c 23 cm. 
504 |a Includes bibliographical references and index. 
650 0 |a Clean rooms. 
700 1 |a Reinmuller, Berit 
991 |a MONOGRAPHS  |b 4  |c 2018-11-06 19:32:52  |d 2021-10-27 14:39:14  |e mut  |f n  |g null  |h n  |i a  |j m  |k    |l a  |m    |n a  |o    |p b  |q    |r flu  |s eng  |t 2002   |v Clean room design : minimizing contamination through proper design / 

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