Clean room design : minimizing contamination through proper design / Bengt Ljungqvist, Berit Reinmuller
Main Author: | Ljungqvist, Bengt |
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Other Authors: | Reinmuller, Berit |
Format: | MONOGRAPHS |
Language: | English |
Published: |
Boca Raton : CRC Press, 2002 |
Subjects: |
Clean rooms.
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Physical Description: |
x, 145 p. : illus. ; 23 cm. |
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Bibliography: |
Includes bibliographical references and index. |
ISBN: |
1574910329 |