Nano-and microelectromechanical systems : fundamentals of nano-and microengineering / Sergey Edward Lyshevski
| Main Author: | Lyshevski, Sergey Edward |
|---|---|
| Format: | MONOGRAPHS |
| Language: | English |
| Published: |
Boca Raton : CRC Press, 2001 |
| Series: |
Nano-and microscience, engineering, technology and medicine series
|
| Subjects: |
Microelectromechanical systems.
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