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|a 0849309166
|c 3643
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|a DLC
|c MUT
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4 |
|a TK7875
|b L96N35
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| 100 |
1 |
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|a Lyshevski, Sergey Edward
|
| 245 |
1 |
0 |
|a Nano-and microelectromechanical systems : fundamentals of nano-and microengineering
|b /
|c Sergey Edward Lyshevski
|
| 260 |
|
|
|a Boca Raton :
|b CRC Press,
|c 2001
|
| 300 |
|
|
|a 337 p. :
|b illus. ;
|c 23 cm.
|
| 440 |
|
0 |
|a Nano-and microscience, engineering, technology and medicine series
|
| 504 |
|
|
|a Includes bibliographical references and index.
|
| 650 |
|
0 |
|a Microelectromechanical systems.
|
| 991 |
|
|
|a MONOGRAPHS
|b 6
|c 2018-11-06 19:32:33
|d 2021-10-27 14:39:14
|e mut
|f n
|g null
|h n
|i a
|j m
|k
|l a
|m
|n a
|o
|p b
|q
|r flu
|s eng
|t 2001
|v Nano-and microelectromechanical systems : fundamentals of nano-and microengineering /
|
