Fundamentals of microfabrication / Marc Madou
| Main Author: | Modou, Marc |
|---|---|
| Format: | MONOGRAPHS |
| Language: | English |
| Published: |
Boca Raton : CRC Press, 1997 |
| Subjects: |
Lasers --
> Industrial applications.
Machining. Microelectronic packaging. Microelectronics -- > Design and construction. |
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| 020 | |a 0849394511 |c 4498 | ||
| 040 | |a DLC |c MUT | ||
| 050 | 4 | |a TK7836 |b M33F83 | |
| 100 | 1 | |a Modou, Marc | |
| 245 | 1 | 0 | |a Fundamentals of microfabrication |b / |c Marc Madou |
| 260 | |a Boca Raton : |b CRC Press, |c 1997 | ||
| 300 | |a 589 p. : |b illus. ; |c 28 cm. | ||
| 504 | |a Includes bibliographical references and index. | ||
| 650 | 0 | |a Lasers -- |x Industrial applications. | |
| 650 | 0 | |a Machining. | |
| 650 | 0 | |a Microelectronic packaging. | |
| 650 | 0 | |a Microelectronics -- |x Design and construction. | |
| 991 | |a MONOGRAPHS |b 6 |c 2018-11-06 19:31:30 |d 2022-06-16 15:19:42 |e mut |f n |g null |h n |i a |j m |k |l a |m |n a |o |p b |q |r flu |s eng |t 1997 |v Fundamentals of microfabrication / | ||