Fundamentals of microfabrication / Marc Madou
| Main Author: | Modou, Marc |
|---|---|
| Format: | MONOGRAPHS |
| Language: | English |
| Published: |
Boca Raton : CRC Press, 1997 |
| Subjects: |
Lasers --
> Industrial applications.
Machining. Microelectronic packaging. Microelectronics -- > Design and construction. |
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| Physical Description: |
589 p. : illus. ; 28 cm. |
|---|---|
| Bibliography: |
Includes bibliographical references and index. |
| ISBN: |
0849394511 |