Journal of microelectromechanical system
| Other Authors: | American Society of Mechanical Engineers |
|---|---|
| Format: | PERIODICALS |
| Language: | English |
| Published: |
New York : Institute of Electrical and Electronics Engineers, |
| Subjects: |
Microelectromechanical systems
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| Tags: |
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| Physical Description: |
v. : illus. ; 26 cm. |
|---|---|
| ISSN: |
ISSN 7556-2394 (Quarterly) |