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|a ISSN 7556-2394 (Quarterly)
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| 040 |
|
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|a DLC
|c MUT
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| 093 |
|
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|a TK7875 J6
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| 245 |
1 |
4 |
|a Journal of microelectromechanical system
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| 260 |
|
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|a New York :
|b Institute of Electrical and Electronics Engineers,
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| 300 |
|
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|a v. :
|b illus. ;
|c 26 cm.
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| 650 |
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0 |
|a Microelectromechanical systems
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| 710 |
2 |
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|a American Society of Mechanical Engineers
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| 991 |
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|a PERIODICALS
|b 3
|c 2018-11-06 21:13:19
|d 2021-10-17 09:46:50
|e mut
|f n
|g 2021-04-07
|h n
|i a
|j s
|k
|l a
|m
|n a
|o
|p s
|q
|r nyu
|s eng
|t
|v Journal of microelectromechanical system
|
