Microlithography : science and technology / James R. Sheats, Bruce W. Smith, editors
| Other Authors: | Sheats, James R., Smith, Bruce W. |
|---|---|
| Format: | MONOGRAPHS |
| Language: | English |
| Published: |
New York : Marcel Dekker, 1998 |
| Subjects: |
Integrated circuits --
> Masks.
Manufacturing processes. Metal oxide semiconductors, Complementary -- > Design and construction. Microlithography -- > Industrial applications. |
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| 245 | 1 | 0 | |a Microlithography : science and technology |b / |c James R. Sheats, Bruce W. Smith, editors |
| 260 | |a New York : |b Marcel Dekker, |c 1998 | ||
| 300 | |a xiii, 780 p. : |b illus. ; |c 23 cm. | ||
| 504 | |a Includes bibliographical references and index. | ||
| 650 | 0 | |a Integrated circuits -- |x Masks. | |
| 650 | 0 | |a Manufacturing processes. | |
| 650 | 0 | |a Metal oxide semiconductors, Complementary -- |x Design and construction. | |
| 650 | 0 | |a Microlithography -- |x Industrial applications. | |
| 700 | 1 | |a Sheats, James R. | |
| 700 | 1 | |a Smith, Bruce W. | |
| 991 | |a MONOGRAPHS |b 4 |c 2018-11-06 23:04:08 |d 2022-05-10 16:28:43 |e mut |f n |g null |h n |i a |j m |k |l a |m |n a |o |p b |q |r nyu |s eng |t 1998 |v Microlithography : science and technology / | ||