Microlithography : science and technology / James R. Sheats, Bruce W. Smith, editors
| Other Authors: | Sheats, James R., Smith, Bruce W. |
|---|---|
| Format: | MONOGRAPHS |
| Language: | English |
| Published: |
New York : Marcel Dekker, 1998 |
| Subjects: |
Integrated circuits --
> Masks.
Manufacturing processes. Metal oxide semiconductors, Complementary -- > Design and construction. Microlithography -- > Industrial applications. |
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| Physical Description: |
xiii, 780 p. : illus. ; 23 cm. |
|---|---|
| Bibliography: |
Includes bibliographical references and index. |
| ISBN: |
0824799534 |