Microelectronic processing : an introduction to the manufacture of integrated circuits / W. Scot Ruska
| Main Author: | Ruska, W. Scot |
|---|---|
| Format: | MONOGRAPHS |
| Language: | English |
| Published: |
New York : McGraw-Hill, 1988 |
| Series: |
McGraw-Hill electrical & electronic engineering series
|
| Subjects: |
Integrated circuits --
> Design and construction.
Semiconductors. Transistors. |
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| 001 | 0011792 | ||
| 003 | Th-MUT | ||
| 008 | 181106s1988 xx 000 0 eng d | ||
| 020 | |a 0070542805 | ||
| 040 | |a DLC |c MUT | ||
| 050 | 4 | |a TK7874 |b R92M51 | |
| 100 | 1 | |a Ruska, W. Scot | |
| 245 | 1 | 0 | |a Microelectronic processing : an introduction to the manufacture of integrated circuits |b / |c W. Scot Ruska |
| 260 | |a New York : |b McGraw-Hill, |c 1988 | ||
| 300 | |a xviii, 430 p. : |b graphs ; |c 22 cm. | ||
| 440 | 0 | |a McGraw-Hill electrical & electronic engineering series | |
| 500 | |a Includes index. | ||
| 650 | 0 | |a Integrated circuits -- |x Design and construction. | |
| 650 | 0 | |a Semiconductors. | |
| 650 | 0 | |a Transistors. | |
| 991 | |a MONOGRAPHS |b 10 |c 2018-11-06 23:36:23 |d 2022-11-28 10:33:09 |e mut |f n |g null |h n |i a |j m |k |l a |m |n a |o |p b |q |r nyu |s eng |t 1988 |v Microelectronic processing : an introduction to the manufacture of integrated circuits / | ||