Microelectronic processing : an introduction to the manufacture of integrated circuits / W. Scot Ruska
| Main Author: | Ruska, W. Scot |
|---|---|
| Format: | MONOGRAPHS |
| Language: | English |
| Published: |
New York : McGraw-Hill, 1988 |
| Series: |
McGraw-Hill electrical & electronic engineering series
|
| Subjects: |
Integrated circuits --
> Design and construction.
Semiconductors. Transistors. |
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| Item Description: |
Includes index. |
|---|---|
| Physical Description: |
xviii, 430 p. : graphs ; 22 cm. |
| ISBN: |
0070542805 |