Introduction to microelectronic fabrication : modular series on solid state devices, volume V / Richard C. Jaeger
| Main Author: | Jaeger, Richard C. |
|---|---|
| Format: | MONOGRAPHS |
| Language: | English |
| Published: |
Reading, MA. : Addison-Wesley, 1988 |
| Series: |
Modular series on solid state devices
|
| Subjects: |
Integrated circuits --
> Very large scale integration --
> Design and construction.
|
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| Physical Description: |
xiii, 232 p. : illus. ; 23 cm. |
|---|---|
| Bibliography: |
Includes index. |
| ISBN: |
0201146959 |