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Record Citations
APA Citation
Jaeger, R. C. (1988). Introduction to microelectronic fabrication : modular series on solid state devices, volume V. Reading, MA.: Addison-Wesley.
MLA CitationJaeger, Richard C. Introduction to Microelectronic Fabrication : Modular Series On Solid State Devices, Volume V. Reading, MA.: Addison-Wesley, 1988.
Warning: These citations may not always be 100% accurate.