Semiconductor manufacturing technology / Michael Quirk
| Main Author: | Quirk, Michael |
|---|---|
| Other Authors: | Serda, Julian |
| Format: | MONOGRAPHS |
| Language: | English |
| Published: |
Upper Saddle River, NJ. : Pearson Education, 2001 |
| Subjects: |
Electronic industries.
Semiconductors -- > Design and construction. |
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| Physical Description: |
xiii, 666 p. : 26 cm. |
|---|---|
| Bibliography: |
Includes bibliographical references (page 647) and index |
| ISBN: |
0131229370 |