| LEADER |
00621nas a2200157 a 4500 |
| 001 |
0029914 |
| 003 |
Th-MUT |
| 008 |
181106s9999 xx 000 0 eng d |
| 022 |
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|a ISSN 0894-6507 (Quarterly)
|
| 040 |
|
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|a DLC
|c MUT
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| 093 |
|
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|a TK7836 I1
|
| 245 |
1 |
0 |
|a IEEE transactions on semiconductor manufacturing
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| 260 |
|
|
|a New York :
|b The Institute of Electrical and Electronics Engineers,
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| 300 |
|
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|a v. :
|b illus. ;
|c 28 cm.
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| 650 |
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0 |
|a Semiconductors
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| 991 |
|
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|a PERIODICALS
|b 3
|c 2018-11-07 05:22:19
|d 2021-10-14 10:23:55
|e mut
|f n
|g 2021-04-07
|h n
|i a
|j s
|k
|l a
|m
|n a
|o
|p s
|q
|r nyu
|s eng
|t
|v IEEE transactions on semiconductor manufacturing
|
