Vacuum mechatronics / Gerardo Beni...[et al.]
| Main Author: | Beni, Gerardo |
|---|---|
| Format: | MONOGRAPHS |
| Language: | English |
| Published: |
Boston, MA. : Artech House, 1990 |
| Subjects: |
Automatic control.
Vacuum technology. Vacuum. |
| Tags: |
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| Item Description: |
Includes index. |
|---|---|
| Physical Description: |
xi, 377 p. : illus., graphs, tables ; 27 cm. |
| ISBN: |
0890064563 |
