Vacuum mechatronics / Gerardo Beni...[et al.]
Main Author: | Beni, Gerardo |
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Format: | MONOGRAPHS |
Language: | English |
Published: |
Boston, MA. : Artech House, 1990 |
Subjects: |
Automatic control.
Vacuum technology. Vacuum. |
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Item Description: |
Includes index. |
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Physical Description: |
xi, 377 p. : illus., graphs, tables ; 27 cm. |
ISBN: |
0890064563 |