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Vacuum mechatronics / Gerardo Beni...[et al.]

Main Author: Beni, Gerardo
Format: MONOGRAPHS
Language: English
Published: Boston, MA. : Artech House, 1990
Subjects: Automatic control.
Vacuum technology.
Vacuum.
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Item Description: Includes index.
Physical Description: xi, 377 p. : illus., graphs, tables ; 27 cm.
ISBN: 0890064563

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