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Nano-and
microelectromechanical
systems
: fundamentals of nano-and microengineering /
by
Lyshevski, Sergey Edward
Published 2001
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Smart material systems and mems : design and development methodologies /
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Varadan, Vijay K.
Published 2006
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RF mems : theory, design, and technology /
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Rebeiz, Gabriel M.
Published 2003
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Essentials of micro- and nanofluidic : with applications to the biological and chemical sciences /
by
Conlisk, A. Terrence
Published 2013
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Micro- and nanoelectromechanical biosensors /
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Nicu, Liviu
Published 2014
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Thermal nanosystems and nanomaterials /
Published 2009
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