Plasma nanoscience : basic concepts and applications of deterministic nanofabrication / Kostya (Ken) Ostrikov
Main Author: | Ostrikov, Kostya (Ken) |
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Format: | MONOGRAPHS |
Language: | English |
Published: |
Weinheim : Wiley-VCH, 2008 |
Subjects: |
Low temperature plasmas.
Nanostructured materials. Plasma engineering. |
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