Plasma-aided nanofabrication : from plasma sources to nanoassembly / Kostya (Ken) Ostrikov, Shuyan Xu
| Main Author: | Ostrikov, Kostya (Ken) |
|---|---|
| Other Authors: | Xu, Shuyan |
| Format: | MONOGRAPHS |
| Language: | English |
| Published: |
Weinheim : Wiley-VCH, 2007 |
| Subjects: |
Low temperature plasmas.
Nanostructured materials. Plasma engineering. |
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