The role of microscopy in semiconductor failure analysis / B. P. Richards, P. K. Footner
Main Author: | Richards, B. P. |
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Other Authors: | Footner, P. K. |
Format: | MONOGRAPHS |
Language: | English |
Published: |
Oxford : Oxford University 1992 |
Series: |
Microscopy handbook
25
|
Subjects: |
Microscope and microscopy.
Semiconductors Semiconductors |
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Item Description: |
Includes index. |
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Physical Description: |
108 p. : illus. ; 23 cm. |
ISBN: |
0198564325 |