Fundamentals of microelectronics processing / Hong H. Lee
Main Author: | Lee, Hong H. |
---|---|
Format: | MONOGRAPHS |
Language: | English |
Published: |
New York : McGraw-Hill, 1990 |
Series: |
McGraw-Hill international editions chemical engineering series
|
Subjects: |
Integrated circuits --
> Materials.
Integrated circuits -- > Design and construction. |
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